Standard

ISO 23216:2021

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Merknad: Denne standarden har en ny utgave: ISO 23216:2021

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This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane. It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others. It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.

Dokumentinformasjon

  • Standard fra ISO
  • Publisert:
  • products.specs.Expires:
  • Utgave: 1
  • Versjon: 1
  • Varetype: IS
  • ICS 25.220.99
  • ISO TC ISO/TC 107