Standard

ISO 23216:2021

May 2021 Historical draft

Note: This standard has a new edition: ISO 23216:2021

Corrigenda and amendments are bought separately.

Language English

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Abstract

This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane. It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others. It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.

Document information

Standard from ISO
Published: 4 May 2021
Expires: 30 July 2020
Edition: 1
Version: 1
Document type: IS
ISBN:

ICS 25.220.99
ISO TC ISO/TC 107

ISO 23216:2021

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ISO 23216:2021

ISO 23216:2021

ISO 23216:2021

Abstract

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ISO 23216:2021

ISO 23216:2021

ISO 23216:2021

Abstract

Document information