Standard

NEK IEC TR 63258:2021

Publisert

Rettelser og tillegg kjøpes separat.

Språk
Tjenester

Omfang

IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.

Dokumentinformasjon

  • Standard fra NEK
  • Publisert:
  • Utgave: 1.0
  • Versjon: 1
  • Varetype: TR
  • ICS 07.120
  • National Committee NEK/NK113

Produktrelasjon

  • Adoptert fra: IEC TR 63258:2021