Standard

NEK IEC TR 63258:2021

Mar 2021 Published

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Language English

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Abstract

IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.

Document information

Standard from NEK
Published: 19 March 2021
Edition: 1.0
Version: 1
Document type: TR
ISBN:

ICS 07.120
National Committee NEK/NK113

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Adopted from: IEC TR 63258:2021

NEK IEC TR 63258:2021

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Abstract

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Abstract

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