Standard

ISO 21360-6:2023

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Merknad: Denne standarden har en ny utgave: ISO 21360-6:2023

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This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps. It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.

Dokumentinformasjon

  • Standard fra ISO
  • Publisert:
  • Utgave: 1
  • Versjon: 1
  • Varetype: IS
  • Products.Specs.pages
  • ICS 23.160
  • ISO TC ISO/TC 112