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Standard

NS-EN ISO 25178-603:2013

Withdrawn

Note: This standard has a new edition: NS-EN ISO 25178-603:2025

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Abstract

ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.

Document information

  • Standard from SN
  • Published:
  • Withdrawn:
  • Edition: 2013-10
  • Version: 1
  • Document type: NAT
  • ICS 17.040.20
  • National Committee CEN/TC 290

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