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Standard

NS-EN ISO 14644-10:2013

Withdrawn

Note: This standard has a new edition: NS-EN ISO 14644-10:2022

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Abstract

ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.

Document information

  • Standard from SN
  • Published:
  • Withdrawn:
  • Edition: 2013-03
  • Version: 1
  • Document type: NAT
  • ICS 13.040.35
  • National Committee SN/K 100

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