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NEK EN 62374-1:2010

Dec 2010 Published

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Abstract

IEC 62374-1:2010 describes a test method, test structure and lifetime estimation method of the time-dependent dielectric breakdown (TDDB) test for inter-metal layers applied in semiconductor devices.

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Standard from NEK
Published: 1 December 2010
Edition: 2010-11
Version: 1
Document type: NAT
ISBN:

ICS 31.080
National Committee NEK/NK47

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Version history Related corrigendum and amendments (1)

NEK EN 62374-1:2010/AC:2011

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