Standard

ISO 20146:2019

Published

Corrigenda and amendments are bought separately.

Language
Services

Abstract

This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges. This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as reference standards.

Document information

  • Standard from ISO
  • Published:
  • Edition: 1
  • Version: 1
  • Document type: IS
  • ICS 23.160
  • ISO TC ISO/TC 112