Standard

NS-EN 1518:1998

Published

Corrigenda and amendments are bought separately.

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Abstract

This European Standard specifies terms and procedures for the characterization of mass spectrometer leak detectors (MSLD). It is not intended to give a complete set of specifications for an acceptance test but a description of procedures that can be used without particular calibration equipment. An MSLD has an integral high vacuum system for maintaining the sensing element (mass spectrometer) at low operating pressure and for establishing a partial pressure related to the incoming gas flow.

Document information

  • Standard from SN
  • Published:
  • Edition: 1998-04
  • Version: 1
  • Document type: NAT
  • ICS 19.100
  • National Committee SN/K 58

Product Relations

  • Adopted from: EN 1518:1998 , 0