Standard

NEK IEC/IEEE 62659:2015

Sept 2015 Published

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Language English

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Abstract

IEC/IEEE 62659:2015(E) provides a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities through the incorporation of nanomaterials (e.g. carbon nanotubes, graphene, quantum dots, etc.). Since semiconductor manufacturing facilities need to incorporate practices that maintain high yields, there are very strict requirements for how manufacturing is performed. Nanomaterials represent a potential contaminant in semiconductor manufacturing facilities and need to be introduced in a structured and methodical way.

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Standard from NEK
Published: 30 September 2015
Edition: 1.0
Version: 1
Document type: NAT
ISBN:

ICS 07.030
ICS 07.120
ICS 25.020
National Committee TC 113

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Adopted from: CISPR 16-1-4:2019+AMD1:2020+AMD2:2023 CSV
Adopted from: CISPR 16-1-4:2019+AMD1:2020 CSV
Adopted from: CISPR 16-1-4:2019 ED4
Adopted from: IEC/IEEE 62659:2015

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Abstract

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