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Standard

NEK IEC 62047-34:2019

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Abstract

IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.

Document information

  • Standard from NEK
  • Published:
  • Edition: 1.0
  • Version: 1
  • Document type: NAT
  • ICS 31.080.99
  • ICS 31.140
  • National Committee TC 47/SC 47F

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  • Adopted from: IEC 62047-34:2019