Standard

NEK IEC 62047-17:2015

Mar 2015 Published

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Abstract

IEC 62047-17:2015 specifies the method for performing bulge tests on the free-standing film that is bulged within a window. The specimen is fabricated with micro/nano structural film materials, including metal, ceramic and polymer films, for MEMS, micromachines and others. The thickness of the film is in the range of 0,1 μ to 10 μ, and the width of the rectangular and square membrane window and the diameter of the circular membrane range from 0,5 mm to 4 mm. The tests are carried out at ambient temperature, by applying a uniformly-distributed pressure to the testing film specimen with bulging window. Elastic modulus and residual stress for the film materials can be determined with this method.

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Standard from NEK
Published: 5 March 2015
Edition: 1.0
Version: 1
Document type: NAT
ISBN:

ICS 31.080.99
National Committee TC 47/SC 47F

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Adopted from: IEC 60034-12:2016 RLV
Adopted from: IEC 60034-12:2016 ED3
Adopted from: IEC 62047-17:2015

NEK IEC 62047-17:2015

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Abstract

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Abstract

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