Standard

NEK IEC 62047-13:2012

Feb 2012 Published

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Abstract

IEC 62047-13:2012 specifies the adhesive testing method between micro-sized elements and a substrate using the columnar shape of the specimens. This international standard can be applied to adhesive strength measurement of microstructures, prepared on a substrate, with width and thickness of 1 μm to 1 mm, respectively. This standard specifies the adhesive testing method for micro-sized-elements in order to optimally select materials and processing conditions for MEMS devices. This standard does not particularly restrict test piece material, test piece size and performance of the measuring device, since the materials and size of MEMS device components range widely and testing machine for micro-sized materials has not been generalized.

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Standard from NEK
Published: 28 February 2012
Edition: 1.0
Version: 1
Document type: NAT
ISBN:

ICS 31.080.99
National Committee TC 47/SC 47F

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Adopted from: IEC 60945:1996 ED3
Adopted from: IEC 62047-13:2012

NEK IEC 62047-13:2012

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Abstract

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Abstract

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