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Standard

NEK EN 62047-17:2015

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Abstract

IEC 62047-17:2015 specifies the method for performing bulge tests on the free-standing film that is bulged within a window. The specimen is fabricated with micro/nano structural film materials, including metal, ceramic and polymer films, for MEMS, micromachines and others. The thickness of the film is in the range of 0,1 μ to 10 μ, and the width of the rectangular and square membrane window and the diameter of the circular membrane range from 0,5 mm to 4 mm.The tests are carried out at ambient temperature, by applying a uniformly-distributed pressure to the testing film specimen with bulging window. Elastic modulus and residual stress for the film materials can be determined with this method.

Document information

  • Standard from NEK
  • Published:
  • Edition: 1
  • Version: 1
  • Document type: NAT
  • ICS 31.080.99
  • National Committee NEK/NK47

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  • Adopted from: EN 62047-17:2015 , 0