Standard

IEC 62047-34:2019 ED1

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Abstract

IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.

Document information

  • Standard from IEC
  • Published:
  • Edition: 1
  • Version: 1
  • Document type: IS
  • Pages
  • ICS 31.080.99
  • ICS 31.140
  • ISO TC TC 47/SC 47F

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